1  Purpose
1.1  In this Standard, definition and interpretation of each term provides characteristics of materials used for flexible display manufacturing. This Standard benefits unification of terminology generally used for plastic substrates of flexible display manufacturing.
2  Scope
2.1  This Standard is applicable for plastic substrates of flexible display manufacturing. It covers terminology related to plastic substrates of flexible display, used in the area of material, structure, inspection, and measurement.

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI D66-0519 (Reapproved 0924)
SEMI D66-0519 (technical revision)
SEMI D66-0212 (first published)